منابع مشابه
RF MEMS Switch Technology
Commercial Applications Solid state and electromagnetic relay switches are being replaced by MEMS switches due to their lower costs and increased application performance. Some of the benefits of MEMS switches include low power consumption, long life cycle, linearity and increased switching speeds. Applications include highspeed digital channel switching in automated test equipment, filter bank ...
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A new 3-D solenoid-inductor structure that is compatible with standard CMOS technology is proposed. Simulation shows excellent area efficiency of more than 80% saving over conventional planar spiral inductor. If combined with post-micromaching, a peak quality factor greater than 10 at 30GHz can be realized.
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Wideband 100 kHz–4 GHz power sensors are presented, which are based on sensing the electrostatic force between an RF signal line and a suspended membrane. The electrostatic force, which is proportional to the square of the rms signal voltage and thus to the signal power, results in a displacement of the suspended membrane. This displacement is detected capacitively, allowing the sensing of the ...
متن کاملIntegrated Micromechanical Circuits Fueled By Vibrating RF MEMS Technology
Having now produced devices with sufficient Q, thermal stability, aging stability, and manufacturability, vibrating RF MEMS technology is already finding its way into next generation timing and wireless applications. At this juncture, the technology is now poised to take its next logical steps: higher levels of circuit complexity and integration. In particular, as vibrating RF MEMS devices are ...
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RF/microwave MEMS technology. Part one begins with a brief discussion of RF/microwave system requirements, and then introduces the enabling potentialities of the MEMS arsenal to meet these requirements. In particular, MEMS fabrication techniques are addressed, and fundamental components, including inductors, varactors, resonators and transmission lines, as well as the design/ CAD paradigm, are ...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Electrical and Electronic Engineering
سال: 2007
ISSN: 1931-4973,1931-4981
DOI: 10.1002/tee.20139